Surface-Micromachined Photonic Integrated Circuits
نویسنده
چکیده
The ability to integrate micro-optical elements with movable structures and microactuators has opened up many new opportunities for optical and optoelectronic systems"2. It allows us to manipulate optical beams more effectively than conventional methods, and is scalable to large optical systems. Optical MEMS (MicroElectroMechanical Systems) have applications in di~play~"'~, sensing6, and optical data storage778. Recently, telecommunications have become the market driver for Optical MEMS. Many different kinds of devices and systems have been reported, including optical s w i t c h e ~ ~ ~ ' ~ , optical crossconnect'','2, wavelen th division add/drop
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